NDLI: Ultrahigh-Dynamic-Range Resonant MEMS Load Cells for Micromechanical Test Frames

Content Provider	IEEE Xplore Digital Library
Author	Azgin, K. Akin, T. Valdevit, L.
Copyright Year	1992
Abstract	This paper presents a resonant double-ended tuning fork (DETF) force sensor with an experimentally demonstrated resolution of 7 nN and a compressive load range of 0.08 N, exceeding a dynamic range of 140 dB (100 parts per billion). The resonator has a scale factor of 216 kHz/N, a Q -factor exceeding 60 000 at 3-mtorr ambient pressure, and a zero-load resonant frequency of 47.6 kHz. The resonator is kept at resonance via a phase-locked loop composed of discrete elements. The sensor is implemented with a silicon-on-glass process with a 100-μm -thick <;111>; silicon structural layer. The sensor and the complete readout circuit are fully embedded in a compact 65 mm × 52 mm printed circuit board (PCB). The out-of-plane parasitic modes of the DETF are also investigated with finite-element simulations and laser Doppler vibrometry experiments, and are verified to be outside of the device working range. The PCB is mounted on a microstage and coupled with an off-the-shelf displacement actuator to realize an economical, versatile, and robust micromechanical test frame with unprecedented combination of force and displacement resolution and range.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1519
Ending Page	1529
Page Count	11
File Size	2073652
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Force sensors Phase locked loops Vibrations Loading resonant sensors Double-ended tuning fork (DETF) experimental mechanics mechanical test frames microelectromechanical systems (MEMS) micromechanics nanomechanics phase-locked loop (PLL)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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