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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chung-Han Lin Merz, T.A. Doutt, D.R. Jungwoo Joh del Alamo, J.A. Mishra, U.K. Brillson, L.J. |
| Copyright Year | 1963 |
| Abstract | We use depth-resolved cathodoluminescence spectroscopy (DRCLS), Kelvin probe force microscopy (KPFM), and surface photovoltage spectroscopy (SPS) on a nanometer scale to map the temperature, strain, and defects inside GaN high-electron-mobility transistors. DRCLS maps temperature at localized depths, particularly within the 2-D electron gas region during device operation. KPFM maps surface electric potential across the device, revealing lower potential patches that decrease rapidly with increasing off-state stress. CL spectra acquired at these patches exhibit defect emissions that increase with both on- and off-state stresses and that increase with decreasing surface potential. SPS also reveals features of deep level gap states generated after device operation that reduce near-band-edge emission and increase surface band bending. Our nanoscale measurements are consistent with defect generation by inverse piezoelectric field-induced stress at the gate edge on the drain side at high voltage. |
| Sponsorship | IEEE Electron Devices Society |
| Starting Page | 2667 |
| Ending Page | 2674 |
| Page Count | 8 |
| File Size | 1494566 |
| File Format | |
| ISSN | 00189383 |
| Volume Number | 59 |
| Issue Number | 10 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-10-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Stress Logic gates Temperature measurement Gallium nitride HEMTs Surface topography Strain temperature mapping AlGaN/GaN high-electron-mobility transistor (HEMT) defect characterization depth-resolved cathodoluminescence spectroscopy (DRCLS) HEMT Kelvin force probe microscopy strain mapping surface photovoltage spectroscopy (SPS) |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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