NDLI: Large-Area Diode Laser Defect Annealing of Polycrystalline Silicon Solar Cells

Content Provider	IEEE Xplore Digital Library
Author	Eggleston, B. Varlamov, S. Green, M.
Copyright Year	1963
Abstract	A new process was presented to anneal crystallographic defects in solid-phase crystallized silicon that produces higher Suns-V_oc voltages than the conventional belt-furnace annealing (BFA) process. A few-millisecond continuous-wave diode laser treatment anneals defects present in the polycrystalline silicon and activates dopants. It is shown that the silicon/glass-interface system reaches an effective steady state at every point during the laser treatment, and the relative temperature profile is determined by the laser beam profile rather than its power or scanning speed. The peak temperature that is reached during a few-millisecond laser exposure is shown to increase and then level off with laser dose, indicating partial recrystallization of the film. A reduction in boron-doped p-type sheet resistance and phosphorus-doped emitter resistance is reported for a wide range of laser dose and scanning speed. The highest substrate temperature required during the process sequence is reduced from 960°C to 620°C. A peak 1-sun voltage of 492 mV is achieved using a 4-ms exposure at 500-J·cm^-2 laser dose, which is an improvement of 32 mV over the voltage after optimized BFA.
Sponsorship	IEEE Electron Devices Society
Starting Page	2838
Ending Page	2841
Page Count	4
File Size	336215
File Format	PDF
ISSN	00189383
Volume Number	59
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Annealing Temperature measurement Resistance Glass Surface emitting lasers Substrates silicon annealing Defect annealing diode laser polysilicon
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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