NDLI: Design, Modeling, and Control of a Micromachined Nanopositioner With Integrated Electrothermal Actuation and Sensing

Content Provider	IEEE Xplore Digital Library
Author	Yong Zhu Bazaei, A. Moheimani, S.O.R. Yuce, M.R.
Copyright Year	1992
Abstract	In this paper, a real-time feedback control of a novel micromachined one-degree-of-freedom thermal nanopositioner with on-chip electrothermal position sensors is presented. The actuation works based on thermal expansion of silicon beams. The sensing mechanism works based on measuring the difference between the electrical resistances of two electrically biased identical silicon beams. The difference increases with displacement, as the heat conductance of the sensor beams varies oppositely with position, resulting in different beam temperatures and resistances. The sensor pair is operated in differential mode to reduce low-frequency drift. The nanopositioner has a nonlinear static input-output characteristic. An open-loop controller is first designed and implemented. It is experimentally shown that uncertainties and sensor drift result in an unacceptable nanopositioner performance. Hence, feedback control methods are necessary for accurate nanopositioning. A closed-loop feedback control system is designed using a proportional-integral controller together with the nonlinear compensator used for the open-loop control system. The closed-loop system provides an acceptable and robust tracking performance for a wide range of set point values. For triangular reference tracking, which is needed in raster-scanned scanning probe microscopy, the tracking performance of the closed-loop system is further improved by incorporating a feedforward controller.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	711
Ending Page	719
Page Count	9
File Size	1185202
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Temperature sensors Resistors Resistance Nanopositioning thermal position sensing Feedback control microelectromechanical systems (MEMS) nanopositioning thermal actuation
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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