NDLI: A Single-Polarity Piezoresistive Three-Dimensional Stress-Sensing Rosette

Content Provider	IEEE Xplore Digital Library
Author	Gharib, H.H. Moussa, W.A.
Copyright Year	1992
Abstract	This letter presents a study on the feasibility of a new approach for developing a piezoresistive (PR) stress-sensing rosette that is capable of extracting the six stress components with temperature compensation using single-polarity sensing elements (n-type only). Current publicly available PR 3-D stress rosettes extract only four temperature-compensated stresses using a dual-polarity (n- and p-type) rosette. Our proposed approach generates a new set of independent equations based on varying the impurity concentration of the sensing elements and utilizes the distinct properties of the shear PR coefficient (π₄₄) in n-Si. Fabrication of a single-polarity rosette requires less equipment compared to that of a dual-polarity rosette and helps reduce the footprint of the rosette.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	555
Ending Page	557
Page Count	3
File Size	142764
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Stress Temperature sensors Impurities Piezoresistance Silicon Equations temperature compensation Doping piezoresistance piezoresistive (PR) devices stress sensor
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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