NDLI: A Study on Carbon-Nanotube Local Oxidation Lithography Using an Atomic Force Microscope

Content Provider	IEEE Xplore Digital Library
Author	Kumar, K. Sul, O. Strauf, S. Choi, D.S. Fisher, F. Prasad, M.G. Yang, E.
Copyright Year	2002
Abstract	In this paper, nanoscale anodic oxidation lithography using an atomic force microscope (AFM) is systematically studied on carbon nanotubes (CNTs). Trends between the produced feature size and the corresponding process parameters, such as applied voltage, water meniscus length, tip speed during oxidation (hold time), and humidity are observed. By methodically varying these process parameters, the appropriate working ranges have been found to create features of various sizes based on the oxidation of the CNT structure. We have obtained feature sizes down to 58 nm by setting oxidation time per pixel to 20 ms corresponding to a tip speed of 1.50 μ m/s. Optimizing the tip speed during line scans was found to be critical in maintaining the presence of the water meniscus, which was often found to break above the tip speeds of 1 μm/s. In addition, a comparison of the results from employing this technique between CNT and graphene patterning is illustrated. Other factors affecting the reproducibility of the results are addressed in an endeavor to make the oxidization process more robust and repeatable.
Sponsorship	IEEE Nanotechnology Council
Starting Page	849
Ending Page	854
Page Count	6
File Size	569121
File Format	PDF
ISSN	1536125X
Volume Number	10
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-07-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Oxidation Humidity Lithography Force Substrates Atomic force microscopy nanotechnology Atomic force microscopy (AFM) carbon nanotube (CNT) graphene lithography
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Electrical and Electronic Engineering Computer Science Applications

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