NDLI: Processing Techniques for Monolithic Interconnection of Solar Cells at Wafer Level

Content Provider	IEEE Xplore Digital Library
Author	Helmers, H. Oliva, E. Bronner, W. Dimroth, F. Bett, A.W.
Copyright Year	1963
Abstract	Monolithic interconnected modules are large-area high-voltage photovoltaic devices that are realized through solar cell segments that are series-connected via interconnection trenches during wafer processing. This paper investigates different processing techniques, giving detailed information about each processing sequence. In the first approach, a wet chemical etching procedure and photo-defined polyimide as dielectric film is used, leading to minimal trench width of 86 μm. Furthermore, we examine the applicability of advanced processing techniques. An alternative dry-etching process using reactive ion etching in inductively coupled plasma is investigated. With this technique, smooth and near-vertical sidewalls could be achieved, whereas the undercuts in etching profile, which are inevitable when using wet chemical etching, could be avoided. Moreover, an accurate processing technique for plasma-enhanced chemical vapor deposited SiNx as a dielectric film for electrical isolation is presented. This allowed sufficient isolation to be achieved, as well as enabling precise structuring. With these advanced processing techniques, trench widths of 57 μm were realized, resulting in a reduction of area losses due to interconnection from 9% to below 6%.
Sponsorship	IEEE Electron Devices Society
Starting Page	3355
Ending Page	3360
Page Count	6
File Size	796127
File Format	PDF
ISSN	00189383
Volume Number	57
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Etching Photovoltaic cells Polyimides Dielectric films Photovoltaic systems Monolithic integrated circuits III–V semiconductors etching monolithic interconnection photovoltaic (PV) cells
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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