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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Pa, P.S. |
| Copyright Year | 1963 |
| Abstract | This paper proposes a new design module for reverse-connected microelectrochemical machining (μ-ECM), which is based on a novel electrochemical reaction that offers the fast removal of indium-tin-oxide (ITO) nanostructures from the surfaces of color filters in displays. Unlike general μ-ECM models, the reverse-connected μ-ECM model is implemented by connecting a workpiece to the cathode and an electrode to the anode of a dc power supply. During the course of machining, electrons travel from the cathode to the anode, so that the ITO film is lifted and removed at high speed by an electric field. In general μ-ECM models, a workpiece is connected to the anode, an electrode is connected to the cathode, and the material removal is achieved by dissolution. In contrast, the reverse-connected μ-ECM model provides higher removal efficiency and higher surface quality of color filters in displays during machining processes, thereby breaking new ground in superfine machining for applications in the photoelectric semiconductor industry. |
| Sponsorship | IEEE Electron Devices Society |
| Starting Page | 3388 |
| Ending Page | 3394 |
| Page Count | 7 |
| File Size | 751357 |
| File Format | |
| ISSN | 00189383 |
| Volume Number | 57 |
| Issue Number | 12 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-12-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Color Indium tin oxide Nanoscale devices Nanostructures Optical devices Liquid crystal displays Electrochemical machining Micromachining reverse connected Displays microelectrochemical machining ($ \mu$-ECM) module design nanoscale nanostructures optical devices |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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