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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yan Xin Zhuang Hansen, O. Knieling, T. Wang, C. Rombach, P. Lang, W. Benecke, W. Kehlenbeck, M. Koblitz, J. |
| Copyright Year | 1992 |
| Abstract | We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices. |
| Sponsorship | IEEE Electron Devices Society American Society of Mechanical Engineering (ASME) |
| Starting Page | 1451 |
| Ending Page | 1460 |
| Page Count | 10 |
| File Size | 611696 |
| File Format | |
| ISSN | 10577157 |
| Volume Number | 16 |
| Issue Number | 6 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-12-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Coatings Thermal force Friction Thermal stability Nanoelectromechanical systems Nanostructures Microstructure Silicon Self-assembly vapor phase Adhesion anti-stiction friction self-assembled monolayer (SAM) thermal stability |
| Content Type | Text |
| Resource Type | Article |
| Subject | Mechanical Engineering Electrical and Electronic Engineering |
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