NDLI: Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Content Provider	IEEE Xplore Digital Library
Author	Ashurst, W.R. Yau, C. Carraro, C. Maboudian, R. Dugger, M.T.
Copyright Year	1992
Abstract	This paper presents a quantitative comparison of the dichlorodimethylsilane (DDMS) monolayer to the octade-cyltrichlorosilane (OTS) self-assembled monolayer (SAM) with respect to the film properties and their effectiveness as anti-stiction coatings for micromechanical structures. Both coatings have been evaluated in several ways, including atomic force microscopy (AFM), contact angle analysis (CAA), work of adhesion by cantilever beam array (CBA) technique and coefficient of static friction using a sidewall testing device. While water and hexadecane contact angles are comparable, the DDMS coated microstructures exhibit higher adhesion than OTS coated ones. Furthermore, coefficient of static friction data indicate that the DDMS films are not as effective at lubrication as the OTS SAMs are, although both exhibit much improvement over chemical oxide. However, AFM data show that the samples which receive DDMS treatment accumulate fewer particles during processing than those which receive the OTS SAM treatment. The thermal stability of the DDMS film in air far exceeds the OTS SAM, as the DDMS remains very hydrophobic to temperatures upwards of 400/spl deg/C.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	41
Ending Page	49
Page Count	9
File Size	490198
File Format	PDF
ISSN	10577157
Volume Number	10
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Distributed decision making Coatings Atomic force microscopy Adhesives Friction Atomic beams Atomic layer deposition Computer aided analysis Structural beams
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switch

Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS

Investigation of Anti-Stiction Coating for MEMS Switch using Atomic Force Microscope

Adhesion characteristics of MEMS in microfluidic environments

Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor

Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors

Force-deflection characterization of individual carbon nanotubes attached to MEMS devices

Self-assembled real monolayer coating to improve release of MEMS structures

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Similar Documents

Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switch

Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS

Investigation of Anti-Stiction Coating for MEMS Switch using Atomic Force Microscope

Adhesion characteristics of MEMS in microfluidic environments

Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor

Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors

Force-deflection characterization of individual carbon nanotubes attached to MEMS devices

Self-assembled real monolayer coating to improve release of MEMS structures

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer