NDLI: Modeling, Simulation, and Verification of an Advanced Micromirror Using SUGAR

Content Provider	IEEE Xplore Digital Library
Author	Clark, J.V. Pister, K.S.J.
Copyright Year	1992
Abstract	We present some of the design, modeling, and simulation features of a computer-aided engineering tool for microelectromechanical systems (MEMS) called SUGAR. The features include a flexible SPICE-like netlist language for MEMS design, a simple modeling framework for computationally efficient lumped models, an extensible architecture to which users can add features, and the ability to display 3-D circuits together with deflected electromechanical structures. Since SUGAR is programmed in MATLAB, many MATLAB functions and toolboxes may be used with SUGAR. Such attributes facilitate the exploration of design spaces and feature modifications. In this paper, we describe SUGAR's extensible architecture, flexible design methodology, modeling framework, and reduced-order modeling technique. We do not present the many other advances made for SUGAR by other developers. For a test case, we choose an advanced microdevice that is difficult to simulate with conventional MEMS software. We show that the relative errors of our lumped models are less than 3% of the finite-element analysis (FEA), that the computational costs are less than 1% of the FEA, and that simulation of the test case fairly agrees with the experiment.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1524
Ending Page	1536
Page Count	13
File Size	1595778
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromirrors Mathematical model Computational modeling Micromechanical devices Computer displays Computer architecture MATLAB Circuit simulation Computer simulation Design engineering system analysis and design Design methodology finite-element methods modeling simulation software SPICE
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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