NDLI: On the design of RF spiral inductors on silicon

Content Provider	IEEE Xplore Digital Library
Author	Burghartz, J.N. Rejaei, B.
Copyright Year	1963
Abstract	This review of design principles for implementation of a spiral inductor in a silicon integrated circuit fabrication process summarizes prior art in this field. In addition, a fast and physics-based inductor model is exploited to put the results contributed by many different groups in various technologies and achieved over the past eight years into perspective. Inductors are compared not only by their maximum quality factors (Q/sub max/), but also by taking the frequency at Q/sub max/, the inductance value (L), the self-resonance frequency (f/sub SR/), and the coil area into account. It is further explained that the spiral coil structure on a lossy silicon substrate can operate in three different modes, depending at first order on the silicon doping concentration. Ranging from high to low substrate resistivity, inductor-mode, resonator-mode, and eddy-current regimes are defined by characteristic changes of Q/sub max/, L, and f/sub SR/. The advantages and disadvantages of patterned or blanket resistive ground shields between the inductor coil and substrate and the effect of a substrate contact on the inductor are also addressed in this paper. Exploring optimum inductor designs under various constraints leverages the speed of the model. Finally, in view of the continuously increasing operating frequencies in advancing to new generations of RF systems, the range of feasible inductance values for given quality factors are predicted on the basis of optimum technological features.
Sponsorship	IEEE Electron Devices Society
Starting Page	718
Ending Page	729
Page Count	12
File Size	1000630
File Format	PDF
ISSN	00189383
Volume Number	50
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Q factor Eddy currents Losses Electromagnetic shielding Integrated circuit design Integrated circuit modeling Magnetic microwave devices
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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