NDLI: The process specification system for MMST

Content Provider	IEEE Xplore Digital Library
Author	Kristoff, P.R. Nunn, D.P.
Copyright Year	1988
Abstract	A specification application (SPEC) was created as part of the Microelectronics Manufacturing Science and Technology (MMST) program at Texas Instruments Incorporated. The overall goal of the MMST program was the development of the next generation wafer fabrication system by improving key areas in the fabrication of wafers, including cycle time, cost, and quality. This paper presents the key features of SPEC used to meet the MMST goals. SPEC composes process flow specifications from equipment, step, sequence, and wafer specification hierarchies. Specifications can be reused and can be machine independent. These specifications are integrated into a specification management framework that provides both revision and change notice control. SPEC integrates with other MMST applications to process wafers; including material release into the factory, material movement, machine scheduling, and direct control of equipment-all key features of a paperless factory. During the processing of a wafer, SPEC uses the latest version of a specification. SPEC played a key role in the MMST program especially during the 1000 wafer pilot production run which achieved a single wafer cycle time of less than 72 h.<>
Sponsorship	IEEE Electron Devices Society IEEE Components, Packaging, and Manufacturing Technology Society IEEE Reliability Society IEEE Solid-State Circuits Society
Starting Page	262
Ending Page	271
Page Count	10
File Size	1702895
File Format	PDF
ISSN	08946507
Volume Number	8
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Production facilities Instruments Fabrication Job shop scheduling Condition monitoring Microelectronics Costs Computer integrated manufacturing Production systems Processor scheduling
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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