NDLI: Mechanisms of Charge Buildup in MOS Insulators

Content Provider	IEEE Xplore Digital Library
Author	Johnson, Walter C.
Copyright Year	1963
Abstract	The radiation sensitivity of MOS devices has been recognized to be the result of a charge buildup caused by the sweepout of electrons and the trapping of holes following hole-electron pair production by ionizing radiation. Holes have been shown to have a finite, although small, mobility in thermally grown SiO2. Trapping of holes takes place near the Si-SiO2 interface, possibly by oxygen vacancies in the oxide. Normal thermally grown SiO2 possesses only small concentrations of electron traps. Electron traps have been shown to be generated, however, in the oxide by ion implantation, by irradiation with nonpenetrating electrons, and by exposure of the surface of the oxide to negative ions from a corona discharge. Although Na+ and Li+ ions have been shown to be mobile at room temperature in SiO2, contamination can be kept to levels where ionic charge buildup is negligible. The role of contaminants in the formation of hole traps, however, remains to be determined.
Sponsorship	IEEE Nuclear and Plasma Sciences Society Computer Applications in Nuclear and Plasma Sciences (CANPS) Lawrence Berkeley Lab. Lawrence Livermore Nat. Lab. APS College of William and Mary Continuous Electron Beam Accelerator Facility NASA Defence Nuclear Agency Sandia National Laboratories Jet Propulsion Laboratory Brookhaven Nat. Lab. Lawrence Livermore Nat. Lab IEEE/NPPS Radiat. Effects Committee Defence Nuclear Agency/DoD Sandia National Laboratories/DOE Jet Propulsion Laboratory/NASA Phillips Lab./DoD
Starting Page	2144
Ending Page	2150
Page Count	7
File Size	1983598
File Format	PDF
ISSN	00189499
Volume Number	22
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1975-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Insulation Electron traps Ionizing radiation MOS devices Charge carrier processes Production Ion implantation Surface contamination Surface discharges Corona
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Electrical and Electronic Engineering Nuclear Energy and Engineering

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