NDLI: E and H Modes of Inductively Coupled SO<sub>2</sub> Plasma

Content Provider	IEEE Xplore Digital Library
Author	Zaplotnik, R.
Copyright Year	1973
Abstract	Inductively coupled plasma (ICP) represents a source of charged as well as neutral reactive particles. Plasma created in sulfur dioxide (SO₂) gas is a source of SO radicals suitable for functionalization of delicate organic materials with SO groups, provided the appropriate discharge mode is chosen. The ICP was sustained in either Eor H-mode. In the first case, the plasma glow is rather uniform along the entire reactor and the color is dark blue due to extensive radiation originating from excited SO radicals. In the H-mode, the light intensity is orders of magnitude larger in the coil, and the image is white due to various atomic transitions in the entire spectrum. The plasma density in the H-mode is, therefore, large enough to cause not only dissociation of SO₂ to SO but also destruction of SO radicals to S and O atoms, so plasma created in H-mode is not that suitable for functionalization of organic materials with SO groups.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	2532
Ending Page	2533
Page Count	2
File Size	264271
File Format	PDF
ISSN	00933813
Volume Number	42
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasmas Discharges (electric) Atomic measurements Radio frequency Organic materials Coils Optical imaging plasmas Plasma applications plasma measurements
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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