NDLI: Fast Time Resolved Techniques as Key to the Understanding of Energy and Particle Transport in HPPMS-Plasmas

Content Provider	IEEE Xplore Digital Library
Author	Maszl, C. Breilmann, W. Berscheid, L. Benedikt, J. von Keudell, A.
Copyright Year	1973
Abstract	High-power pulsed magnetron sputtering (HPPMS) plasmas are pulsed discharges, where the plasma composition as well as the fluxes and energies of ions are changing during the pulse. The time resolved energy distribution for Ar¹⁺ ions was measured and phase resolved optical emission spectroscopy for the Ar I line at 760 nm was done to get more insight in the transport properties of the plasma forming noble gas. These measurements were performed during HPPMS of titanium with argon at 0.5 Pa. The peak power density during the 50-μs pulses was 1.8 kW/cm². In this contribution, we demonstrate how time resolved mass spectrometry and Intensified Charge-Coupled Device, Intensified CCD cameras can be used to shed more light on energy and particle transport in HPPMS-plasmas.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	2812
Ending Page	2813
Page Count	2
File Size	496095
File Format	PDF
ISSN	00933813
Volume Number	42
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasmas Ions Argon Sputtering Energy resolution Plasma measurements Density measurement Plasma transport processes. Plasma transport processes
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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