NDLI: Electronic and interfacial properties of pd/6h-sic schottky diode gas sensors

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Electronic and interfacial properties of pd/6h-sic schottky diode gas sensors

Content Provider	NASA Technical Reports Server (NTRS)
Author	Petit, Jeremy B. Knight, Dak Chen, Liang-Yu Liu, Chung-Chiun Hunter, Gary W. Bansal, Gaurav Neudeck, Philip G. Wu, Qinghai
Copyright Year	1996
Description	Pd/SiC Schottky diodes detect hydrogen and hydrocarbons with high sensitivity. Variation of the diode temperature from 100 C to 200 C shows that the diode sensitivity to propylene is temperature dependent. Long-term heat treating at 425 C up to 140 hours is carried out to determine the effect of extended heat treating on the diode properties and gas sensitivity. The heat treating significantly affects the diode's capacitive characteristics, but the diode's current carrying characteristics are much more stable with a large response to hydrogen. Scanning Electron Microscopy and X-ray Spectrometry studies of the Pd surface after the heating show cluster formation and background regions with grain structure observed in both regions. The Pd and Si concentrations vary between grains. Auger Electron Spectroscopy depth profiles revealed that the heat treating promoted interdiffusion and reaction between the Pd and SiC dw broadened the interface region. This work shows that Pd/SiC Schottky diodes have significant potential as high temperature gas sensors, but stabilization of the structure is necessary to insure their repeatability in long-term, high temperature applications.
File Size	645970
Page Count	12
File Format	PDF
Alternate Webpage(s)	http://archive.org/details/NASA_NTRS_Archive_19960047097
Archival Resource Key	ark:/13960/t4dn92t43
Language	English
Publisher Date	1996-06-01
Access Restriction	Open
Subject Keyword	Schottky Diodes Temperature Dependence Performance Tests Stabilization Hydrogen Hydrocarbons Silicon Carbides Palladium Sensitivity Heating Capacitance Electric Current Gas Detectors Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science
Content Type	Text
Resource Type	Article

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