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Hydrogen gas sensors fabricated on atomically flat 4h-sic webbed cantilevers
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Spry, David J. Chen, Liang-Yu Trunek, Andrew J. Hunter, Gary W. Androjna, Drago Neudeck, Philip G. Evans, Laura J. |
| Copyright Year | 2007 |
| Description | This paper reports on initial results from the first device tested of a "second generation" Pt-SiC Schottky diode hydrogen gas sensor that: 1) resides on the top of atomically flat 4H-SiC webbed cantilevers, 2) has integrated heater resistor, and 3) is bonded and packaged. With proper selection of heater resistor and sensor diode biases, rapid detection of H2 down to concentrations of 20 ppm was achieved. A stable sensor current gain of 125 +/- 11 standard deviation was demonstrated during 250 hours of cyclic test exposures to 0.5% H2 and N2/air. |
| File Size | 502127 |
| Page Count | 4 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20150022221 |
| Archival Resource Key | ark:/13960/t9q28wd90 |
| Language | English |
| Publisher Date | 2007-10-14 |
| Access Restriction | Open |
| Subject Keyword | Fabrication Schottky Diodes Hydrogen Silicon Carbides Standard Deviation Cantilever Beams Nitrogen Detection Gas Detectors Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Article |
