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Gas sensing diode and method of manufacturing
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2000 |
| Description | A diode for sensing hydrogen and hydrocarbons and the process for manufacturing the diode are disclosed. The diode is a Schottky diode which has a palladium chrome contact on the C-face of an n-type 6H Silicon carbide epilayer. The epilayer is grown on the C-face of a 6H silicon carbide substrate. The diode is capable of measuring low concentrations of hydrogen and hydrocarbons at high temperatures, for example, 800 C. The diode is both sensitive and stable at elevated temperatures. |
| File Size | 247069 |
| File Format | |
| Language | English |
| Publisher Date | 2000-02-22 |
| Access Restriction | Open |
| Subject Keyword | Schottky Diodes Stability Low Concentrations Hydrogen Hydrocarbons Silicon Carbides Palladium Gas Analysis High Temperature Substrates Sensitivity Chromium Manufacturing Detection Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |