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| Content Provider | The American Society of Mechanical Engineers (ASME) Digital Collection |
|---|---|
| Author | Kim, Donghyun Oh, Kyung Su Park, Seungho Kwon, Ohmyoung Choi, Young Ki Lee, Joon Sik |
| Copyright Year | 2008 |
| Abstract | This paper reports the design and simulation of thermal double-cantilever bimorph (TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μm width and 100 μm length, TDCB actuators result in vertical displacement of 28 μm at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators. |
| Sponsorship | Nanotechnology Institute |
| Starting Page | 1063 |
| Ending Page | 1067 |
| Page Count | 5 |
| File Format | |
| ISBN | 0791842924 |
| DOI | 10.1115/MNHT2008-52085 |
| e-ISBN | 0791838137 |
| Volume Number | ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B |
| Conference Proceedings | ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer |
| Language | English |
| Publisher Date | 2008-06-06 |
| Publisher Place | Tainan, Taiwan |
| Access Restriction | Subscribed |
| Subject Keyword | Micro actuators Thermal expansion Intellisuite Thermal double-cantilever bimorph actuators Cantilevers Design Actuators |
| Content Type | Text |
| Resource Type | Article |
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