NDLI: High Resolution Die Stress Mapping Using Arrays of CMOS Sensors

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Chen, Yonggang Richard, C. Jaeger Jeffrey, C. Suhling
Copyright Year	2007
Abstract	This paper reports high resolution die stress measurements using a multiplexed array of 512 current mirror type CMOS piezoresistive FET stress sensor cells fabricated on an MOSIS tiny chip. Using 1.5 μm CMOS technology, a stress mapping resolution of 256 points/mm2 has been obtained, providing high spatial resolution mapping of the stress on the surface of the integrated circuit die. Driven by an on-chip counter, the sequentially scanned array efficiently maps the two-dimensional stress field. The sensor array is calibrated using a chip-on-beam calibration technique. These CMOS sensor arrays have been used to map stress on the die in the chip-on-beam configuration under four-point-bending load, in encapsulated chip-on-beam samples, and in DIP40 packages with cavities filled with underfill. The measured stress distribution agrees well with finite element simulation results, and permit smooth measurement of stress gradients on the surface of the integrated circuit die. The results give clear verification that the NMOS PiFET sensors are indeed responding to shear stresses.
Sponsorship	Electronic and Photonic Packaging Division
Starting Page	285
Ending Page	295
Page Count	11
File Format	PDF
ISBN	0791842770
DOI	10.1115/IPACK2007-33569
e-ISBN	0791838013
Volume Number	ASME 2007 InterPACK Conference, Volume 1
Conference Proceedings	ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference
Language	English
Publisher Date	2007-07-08
Publisher Place	Vancouver, British Columbia, Canada
Access Restriction	Subscribed
Subject Keyword	Integrated circuits Cavities Stress concentration Simulation results Shear stress Resolution (optics) Sensors Calibration Finite element analysis Mirrors Complementary metal oxide semiconductors Stress
Content Type	Text
Resource Type	Article

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