NDLI: Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion.

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Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion.

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Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion.

Content Provider	World Health Organization (WHO)-Global Index Medicus
Author	Lee, Dong-Jin Lee, Sun-Kyu
Description	Country affiliation: South Korea Author Affiliation: Lee DJ ( School of Mechatronics, Gwangju Institute of Science and Technology, 123 Cheomdangwagi-ro, Buk-gu, Gwangju 500-712, South Korea.); Lee SK ( School of Mechatronics, Gwangju Institute of Science and Technology, 123 Cheomdangwagi-ro, Buk-gu, Gwangju 500-712, South Korea.)
Abstract	This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.
ISSN	00346748
Issue Number	1
Volume Number	86
e-ISSN	10897623
Journal	Review of Scientific Instruments
Language	English
Publisher	American Institute of Physics
Publisher Date	2015-01-01
Publisher Place	United States
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Motion Ultrasonics Instrumentation Methods Equipment Design Hot Temperature Vibration Journal Article Research Support, Non-u.s. Gov't Discipline Physics Discipline Chemistry
Content Type	Text
Resource Type	Article
Subject	Medicine Instrumentation

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