NDLI: Fabrication and properties of well-ordered arrays of single-crystalline NiSi$_{2}$ nanowires and epitaxial NiSi$

Content Provider	Springer Nature Link
Author	Chuang, Chenfu Cheng, Shaoliang
Copyright Year	2014
Abstract	In this study, we reported the design, fabrication, and characterization of wellordered arrays of vertically-aligned, epitaxial NiSi$_{2}$/Si heterostructures and single-crystalline NiSi$_{2}$ nanowires on (001)Si substrates. The epitaxial NiSi$_{2}$ with $$\{ \bar 111\}$$ facets was found to be the first and the only silicide phase formed inside the Si nanowires after annealing at a temperature as low as 300 °C. Upon annealing at 500 °C for 4 h, the residual parts of Si nanowires were completely consumed and the NiSi$_{2}$/Si heterostructured nanowires were transformed to fully silicided NiSi$_{2}$ nanowires. XRD, TEM and SAED analyses indicated that all the NiSi$_{2}$ nanowires were single crystalline and their axial orientations were parallel to the [001] direction. The obtained vertically-aligned NiSi$_{2}$ nanowires, owing to their well-ordered arrangement, single-crystalline structure, and low effective work function, exhibit excellent field-emission properties with a very low turn-on field of 1.1 V/m. The surface wettability of the nanowires was found to switch from hydrophobic to hydrophilic after the formation of NiSi$_{2}$ phase and the measured water contact angle decreased with increasing extent of Ni silicidation. The increased hydrophilicity can be explained by the Wenzel model. The obtained results present the exciting prospect that the new approach proposed here will provide the capability to fabricate other highly-ordered, vertically-aligned fully silicided nanowire arrays and may offer potential applications in constructing vertical silicide-based nanodevices.
Starting Page	1592
Ending Page	1603
Page Count	12
File Format	PDF
ISSN	19980124
Journal	Nano Research
Volume Number	7
Issue Number	11
e-ISSN	19980000
Language	English
Publisher	Tsinghua University Press
Publisher Date	2014-08-21
Publisher Place	Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	nanosphere lithography Si nanowire NiSi$_{2}$ nanowire field emission wettability Nanotechnology Materials Science Atomic/Molecular Structure and Spectra Condensed Matter Physics Biotechnology Biomedicine general
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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