NDLI: Crystal quality of InN thin films grown on ZnO substrate by radio-frequency molecular beam epitaxy

Content Provider	Springer Nature Link
Author	Ohuchi, Satoru Takizawa, Toshiyuki
Copyright Year	2005
Abstract	The growth of InN on {0001} ZnO substrates by radio-frequency, plasma-assisted, molecular-beam epitaxy (RF-MBE) has been experimentally investigated. The reflection high-energy electron diffraction (RHEED) pattern quickly recovered to a 1×1 streak pattern as the InN growth was started on nitridated ZnO substrates, whereas the RHEED pattern of the ZnO substrate was spotty because of plasma damage induced by nitridation. The full width at half maximum (FWHM) of the (0002) InN rocking curve was estimated to be around 150 arcsec from x-ray diffraction (XRD). Furthermore, we observed a remarkable feature from our experiments; namely, the crystal quality of InN does not seem to depend on the surface polarity of the ZnO substrate, while it is well known that InN growth on GaN has strong polarity dependence. To investigate this tendency, we have also investigated the surface stability of adatoms, In and N, on Zn- and O-face ZnO surfaces using a first-principles technique. From the theoretical study, N adsorption is more stable on ZnO surfaces of both polarities compared with In adsorption. Accordingly, the preferential initiation by N adatoms onto both ZnO surfaces can explain the unique style of InN growth on ZnO substrates.
Starting Page	424
Ending Page	429
Page Count	6
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	34
Issue Number	4
e-ISSN	1543186X
Language	English
Publisher	Springer-Verlag
Publisher Date	2005-01-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	InN ZnO molecular-beam epitaxy (MBE) polarity first-principles calculation Optical and Electronic Materials Characterization and Evaluation of Materials Electronics and Microelectronics, Instrumentation Solid State Physics and Spectroscopy
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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