NDLI: Frictional dynamics of perfluorinated self-assembled monolayers on amorphous SiO$

Content Provider	Springer Nature Link
Author	Lorenz, C.D. Webb, E.B. Stevens, M.J. Chandross, M. Grest, G.S.
Copyright Year	2005
Abstract	Silicon micromachines in microelectromechanical systems (MEMS) are coated with self-assembled monolayers (SAMs) in order to reduce the wear and stiction that are commonplace during operation. Recently, perfluorinated SAMs have been the focus of attention because they have better processing properties than hydrocarbon SAMs. In this study, we perform molecular dynamics simulations that model adhesive contact and friction for perfluorinated alkylsilane (Si(OH)$_{3}$(CF$_{2}$)$_{10}$CF$_{3}$) self-assembled monolayers (SAMs), which are commonly used in MEMS devices. Amorphous silica is used as the substrate for the SAMs in the simulations. The frictional behavior is investigated as a function of applied pressure (50 MPa–1 GPa) for a shear velocity of 2 m/s and compared to recent simulation results of hydrocarbon alkylsilane SAMs. The microscopic friction coefficient for the perfluorinated SAMs is the same as was measured for the hydrocarbon SAMs, but the shear stress is slightly larger than in the case of the hydrocarbon SAMs on amorphous silica.
Starting Page	93
Ending Page	98
Page Count	6
File Format	PDF
ISSN	10238883
Journal	Tribology Letters
Volume Number	19
Issue Number	2
e-ISSN	15732711
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	2005-01-01
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	adhesion friction MEMS devices molecular dynamics simulations perfluorinated SAMs Physical Chemistry Tribology, Corrosion and Coatings Surfaces and Interfaces, Thin Films Theoretical and Applied Mechanics
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Mechanics of Materials Mechanical Engineering Surfaces and Interfaces

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