NDLI: The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

Content Provider	Springer Nature Link
Author	Spengen, W. Merlijn Frenken, Joost W. M.
Copyright Year	2007
Abstract	On-chip MEMS tribometer devices until now have been much less sophisticated for dynamically sensing frictional forces than their FFM (friction force microscope) counterparts. In this article, we present a MEMS-based tribometer that can be used to measure dynamically, on-chip and in-situ, the frictional properties of MEMS-scale contact geometries. The device provides the first FFM-like friction loops with contacting MEMS sidewall surfaces. Depending on the normal load two regimes of operation are identified. At low and intermediate loads, the frictional behaviour reflects wear-less relative motion of the silicon oxide surfaces of the MEMS device and we observe repeatable, irregular stick-slip behaviour, related to the surface roughness. At very high loads, wear causes changes in the topography of the contacting surfaces.
Starting Page	149
Ending Page	156
Page Count	8
File Format	PDF
ISSN	10238883
Journal	Tribology Letters
Volume Number	28
Issue Number	2
e-ISSN	15732711
Language	English
Publisher	Springer US
Publisher Date	2007-08-14
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS devices Friction Adhesion Nanotechnology Physical Chemistry Theoretical and Applied Mechanics Surfaces and Interfaces, Thin Films Tribology, Corrosion and Coatings
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Mechanics of Materials Mechanical Engineering Surfaces and Interfaces

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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