NDLI: Effects of substrate on the domains and electrical properties of epitaxial graphene formed on on-axis C-face 4H-SiC

Content Provider	Springer Nature Link
Author	Hu, Yanfei Zhang, Yuming Guo, Hui Chong, LaiYuan Zhang, Chenxu Zhang, Yimen
Copyright Year	2016
Abstract	The effect of substrate surface preparation on the quality of epitaxial graphene grown on on-axis C-face 4H-SiC has been investigated. Structural epitaxial graphene has been achieved using a graphite enclosure. The homogeneity and domain size of epitaxial graphene on different pretreated substrates were studied using Raman spectroscopy, field emission scanning electron microscopy and hall measurements. The etching of C-face SiC substrate using C$_{3}$H$_{8}$/H$_{2}$ is shown to have a pronounced effect on the domain size and hall mobility of multilayer epitaxial graphene. From Raman measurements, it is found that the pretreatment of substrate has a great influence on the domain size of epitaxial graphene. From hall results, it is found that the effect of substrate pretreatment on carrier mobility follows the same tendency reflected in the results of Raman spectra. It is concluded that the pretreatment of substrate surface, mainly the etching for generating high density, regular and periodic step structure with flatter terrace, would allow the growth of graphene with significantly large area and high mobility, even on large on-axis C-face 4H-SiC wafer.
Starting Page	7595
Ending Page	7602
Page Count	8
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	27
Issue Number	7
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2016-04-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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