NDLI: Conditions for the generation of nano-sized Au agglomerates in Si

Content Provider	Springer Nature Link
Author	Morooka, Masami Morooka, Midori
Copyright Year	2013
Abstract	The conditions for the generation of nano-sized Au agglomerates in Si, which were recently discovered by the author, have been investigated. The agglomerates can be generated under very limited conditions. The agglomerates are generated with a continuous annealing method but are not generated with a typical ordinary annealing method. They are generated at an annealing temperature of 900 °C but not at 930 °C. Agglomerates are not generated in regions less than 6 μm from the surface. They are generated in a sample that is initially supersaturated with Au atoms at 7.5 × 10$^{16}$ cm$^{−3}$ but are only generated at the boundary of the out-diffusion in a sample that initially contains Au atoms at 2.5 × 10$^{16}$ cm$^{−3}$. Generation of the agglomerates becomes difficult as the time to cool to the annealing temperature increases in the continuous annealing process. The generated agglomerates dissolve and disappear as the surrounding Au concentration decreases to the thermal equilibrium value, that is, as the sample recovers from the supersaturation of the surrounding Au.
Starting Page	3776
Ending Page	3781
Page Count	6
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	24
Issue Number	10
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2013-06-07
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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