NDLI: Effect of fluorine doping on the properties of ZnO films deposited by radio frequency magnetron sputtering

Content Provider	Springer Nature Link
Author	Ku, D. Y. Kim, Y. H. Lee, K. S. Lee, T. S. Cheong, B. Seong, T. Y. Kim, W. M.
Copyright Year	2008
Abstract	ZnO films with varying fluorine content were prepared on Corning glass by radio frequency magnetron sputtering of ZnO target containing ZnF$_{2}$ at room temperature, and the compositional, electrical, optical, and structural properties of the as-grown films together with the vacuum-annealed films were investigated. The fluorine content in the fluorine doped ZnO (FZO) films increased almost linearly with increasing ZnF$_{2}$ content in sputter target, and the highest atomic concentration was 7.3%. Vacuum-annealing caused a slight reduction of fluorine content in the films. The resistivity of the as-grown FZO films deposited showed a typical valley-like behavior with respect to the fluorine content in film, i.e. having minimum resistivity at intermediate fluorine content. Despite high fluorine content in the FZO films, the carrier concentration remained below 1.2 × 10$^{20}$ cm$^{−3}$, leading to very low doping efficiency level. Upon vacuum-annealing, the resistivity of FZO films decreased substantially due to increase in both the carrier concentration and the Hall mobility. From the structural analysis made by X-ray diffraction study, it was shown that addition of small amount of fluorine enhanced the crystallinity of FZO films with (002) preferred orientation, and that large amount of fluorine addition yielded disruption of preferred orientation. It was also shown that doping of fluorine rendered a beneficial effect in reducing the absorption loss of ZnO films in visible range, thereby substantially enhancing the figure of merit.
Starting Page	415
Ending Page	421
Page Count	7
File Format	PDF
ISSN	13853449
Journal	Journal of Electroceramics
Volume Number	23
Issue Number	2-4
e-ISSN	15738663
Language	English
Publisher	Springer US
Publisher Date	2008-04-12
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Fluorine doped ZnO film Transparent conducting oxide Magnetron sputtering Vacuum-annealing Crystallography Electrochemistry Characterization and Evaluation of Materials Ceramics, Glass, Composites, Natural Methods Optical and Electronic Materials
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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