NDLI: Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon

Content Provider	Springer Nature Link
Author	Biehl, Saskia Rumposch, Christian Bräuer, Günter Hoffmeister, Hans Werner Luig, Martin
Copyright Year	2014
Abstract	Thin film sensor systems based on hydrogenated carbon have the advantage to combine two very important characteristics in order to be used in measurement engineering: Firstly, the sensory layer demonstrates piezoresistive behavior and secondly its good properties related to hardness and wear resistance lead in a tribologically stable system. Therefore, the thin film sensor systems can be applied into the main distribution of force within machine parts or used for universal interchangeable sensor systems, e.g. sensory washers. In this article the deposition of a self-contained thin film sensor system on a large technical component (spindle shaft) is shown. The spindle shaft with a length of 480 mm and an outer diameter of 90 mm is part of a belt driven machining spindle for planing machines in woodworking industries. In order to establish a measurement system, which allows monitoring the clamping force of the tool holder and the imbalance of the mounted tool, the thin film sensor system was directly applied to the front surface of the spindle shaft. For this application a novel self-contained thin film sensor system was developed, which consists of an alumina layer for electrical isolation, a chromium layer to establish internal sensor electrodes, a piezoresistive hydrogenated carbon layer (1 μm) and a second covering wear resistance and insulation layer (silicon and oxygen modified carbon layer). The piezoresistive sensor layer and the top layer are part of the diamond like carbon layer family (Robertson, Diam Relat Mater 12:79–84, 2003; Bewilogua et al. DLC based coatings for tribological applications, pp. 67–75, 2006; Biehl et al. Thin Solid Films 515(3):1171–1175, 2006, Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems. Springer Verlag, pp. 879–883, 2010).
Starting Page	989
Ending Page	993
Page Count	5
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	20
Issue Number	4-5
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2014-02-22
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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