NDLI: Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

Content Provider	Springer Nature Link
Author	He, Yongsong Wu, Xiaosheng Zheng, Fu Chen, Wenyuan Zhang, Weiping Cui, Feng Liu, Wu
Copyright Year	2013
Abstract	Piezoelectric solid-state micro gyroscope is a novel kind of rotating rate sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with the general vibratory micro gyroscope, it has no evident mass-spring component in its structure, so it has larger stiffness and robust resistance to shake and strike. Therefore, piezoelectric solid-state micro gyroscope can be used in the high-g environment. In this paper, piezoelectric solid-state micro gyroscope working principle is described. The closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope is proposed in order to track the resonance frequency drift, stabilize the driving voltage value and detect the gyroscope output. The closed loop driving circuit (CLDC) mainly contains phase lock loop circuit, automatic gain circuit. Detect circuit mainly contains de-modulator, difference amplifier, Phase shift circuit and low pass filter. Experimental results show that the frequency of CLDC fluctuates within ±15 Hz with the resonance frequency of 357.9 kHz when get its stable status and the fluctuation of reference voltage is within ±7 mv, while the fluctuation of reference voltage in open loop driving circuit is ±23 mv. In the experiment, the sensitivity of the gyroscope with 740 mv/rad/s is observed. The work in the paper provides the theoretical and experimental foundation for realizing for this kind of gyroscope.
Starting Page	185
Ending Page	191
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	20
Issue Number	2
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2013-08-02
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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