NDLI: Carbon nanotube based miniaturized electron gun and column assembly

Content Provider	Springer Nature Link
Author	Koohsorkhi, Javad Mohajerzadeh, Shamsoddin
Copyright Year	2013
Abstract	We report on the application of silicon micromachining for the fabrication of miniaturized electron gun (MEG) assembly using vertically aligned carbon nanotubes. The proposed MEG consists of two main parts of electron gun and the accelerating column. While the electron gun consists of carbon nanotubes grown on a silicon substrate acting as an electron emission source, the accelerating column is made of micromachined silicon wafers with 5 μm thick membranes operating as objective lenses. These two wafers are placed together and sealed using a three-dimensional packaging technique. The simulation and experimental results show the evolution of a narrow electron beam by applying a proper voltage to the anodes and objective lens. The diverging and focusing of the beam can be controlled by applying the proper voltage on electrostatic lenses. This structure could be suitable for low energy SEM devices and surface physics applications.
Starting Page	325
Ending Page	336
Page Count	12
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	20
Issue Number	2
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2013-08-15
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Batch welding of aligned carbon nanotube onto metal electrodes

Atomistic simulation of electrical enhanced nanowelding of carbon nanotube to metal

Manufacturing, assembling and packaging of miniaturized neural implants

Multiwalled carbon nanotube-polyimide nanocomposite for MEMS piezoresistive pressure sensor applications

Single-walled carbon nanotube network/poly composite thin film for flow sensor

Patterning of carbon nanotube films on PDMS using SU-8 microstructures

Micro electron beam welding

Fabrication and testing of a self-propelled, miniaturized PDMS flotilla

Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers

Carbon nanotube based miniaturized electron gun and column assembly

Similar Documents

Batch welding of aligned carbon nanotube onto metal electrodes

Atomistic simulation of electrical enhanced nanowelding of carbon nanotube to metal

Manufacturing, assembling and packaging of miniaturized neural implants

Multiwalled carbon nanotube-polyimide nanocomposite for MEMS piezoresistive pressure sensor applications

Single-walled carbon nanotube network/poly composite thin film for flow sensor

Patterning of carbon nanotube films on PDMS using SU-8 microstructures

Micro electron beam welding

Fabrication and testing of a self-propelled, miniaturized PDMS flotilla

Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers

Carbon nanotube based miniaturized electron gun and column assembly