NDLI: A novel self-aligned electrostatic vertical actuator using plastic deformation technology

Content Provider	Springer Nature Link
Author	Li, Wei Song, Zhaohui Ge, Xiaohong Che, Lufeng Wang, Yuelin
Copyright Year	2013
Abstract	A novel method is presented to fabricate a self-aligned electrostatic vertical actuator using plastic deformation technology. The model of the vertical actuator is proposed and simulated using finite element analysis method. The fixed combs and movable combs, and spring beams are patterned using one mask and fabricated by DRIE technology simultaneously. The fixed combs and movable combs have staggered distance of 21.8 μm in the vertical direction on the condition of self-alignment using plastic deformation technology. The electrostatic vertical actuator has achieved large vertical drive displacement at low voltage. The measurement results show that the maximum drive displacement runs up to 17 μm at 17 V voltage between the fixed combs and movable combs. Experimental results verify the usefulness of the guidelines obtained from simulation and calculation.
Starting Page	251
Ending Page	257
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	20
Issue Number	2
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2013-06-18
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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