NDLI: Grazing-incidence wide-angle X-ray diffraction study on molecular aggregation state of imprinted polyimide film before and after hard baking

Content Provider	Springer Nature Link
Author	Siqing, Sudu Wu, Hui Yamaguchi, Hiroki Shihara, Takamichi Sakata, Osami Takahara, Atsushi
Copyright Year	2012
Abstract	Nanoimprint lithography (NIL) was carried out on precursor of polyimide (PI), poly(amic acid) film, and then hard baking to obtain imprinted PI film. The molecular aggregation states of imprinted PI films before and after hard baking were investigated by grazing-incidence wide-angle X-ray diffraction comparing with the one of flat PI film. It was found that NIL and hard baking can strongly affect the molecular aggregation states of PI film. Before hard baking, PI chain is aligned parallel to the line direction on the line. After hard baking, the alignment in ordered domain was changed to that the PI molecule of which chain axis is perpendicular to the line direction is significantly increased, while, PI molecule of which chain axis is parallel to the line direction is decreased after hard baking. Through comparing with the flat PI, crystallinity of imprinted PI film has been significantly enhanced.
Starting Page	105
Ending Page	115
Page Count	11
File Format	PDF
ISSN	01700839
Journal	Polymer Bulletin
Volume Number	70
Issue Number	1
e-ISSN	14362449
Language	English
Publisher	Springer-Verlag
Publisher Date	2012-06-12
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	GI-WAXD Molecular aggregation state Imprinted PI film Hard baking Polymer Sciences Soft and Granular Matter, Complex Fluids and Microfluidics Characterization and Evaluation of Materials Physical Chemistry
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Chemistry Condensed Matter Physics Polymers and Plastics

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