NDLI: Nanofabrication of arbitrary patterns by nano plastic forming and etching (NPFE)

Content Provider	Springer Nature Link
Author	Rashidi, Hassan Yoshi, Masahiko
Copyright Year	2012
Abstract	In this paper, flexibility of nano plastic forming and etching, an ultra-high resolution nanofabrication process developed recently by the authors, in terms of fabrication of arbitrary patterns as well as applicability to various work materials is demonstrated. First, a thin layer of nickel (Ni) is deposited on a silicon (Si) substrate. Then, it is directly patterned by nano plastic forming. Next, the patterned Ni mask is slightly etched by direct current sputter etching to transfer the pattern into the entire mask thickness and expose the surface of the substrate in the individual patterned areas. Afterward, the pattern is transferred onto the substrate by reactive ion etching. Finally, the remained Ni layer is removed from the substrate, and nanostructures fabricated on the surface of the substrate are revealed. Fabrication of grid patterns with various pitch settings on the surface of Si substrates is demonstrated. The experimental results indicate that the depth and width of the nanostructures can be controlled by the etching time. Also, it is confirmed from the results that the depth and width are not influenced by the pitch setting.
Starting Page	461
Ending Page	468
Page Count	8
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	66
Issue Number	1-4
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2012-07-04
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Nanofabrication Nano plastic forming and etching (NPFE) Nanostructure Pattern variety Work material Industrial and Production Engineering Production/Logistics/Supply Chain Mechanical Engineering Computer-Aided Engineering (CAD, CAE) and Design
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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