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Investigation of the High Mobility IGZO Thin Films by Using Co-Sputtering Method
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hsu, Chao-Ming Tzou, Wen-Cheng Yang, Cheng-Fu Liou, Yu-Jhen |
| Copyright Year | 2015 |
| Abstract | High transmittance ratio in visible range, low resistivity, and high mobility of IGZO thin films were prepared at room temperature for 30 min by co-sputtering of Zn2Ga2O5 (Ga2O3 + 2 ZnO, GZO) ceramic and In2O3 ceramic at the same time. The deposition power of pure In2O3 ceramic target was fixed at 100 W and the deposition power of GZO ceramic target was changed from 80 W to 140 W. We chose to investigate the deposition power of GZO ceramic target on the properties of IGZO thin films. From the SEM observations, all of the deposited IGZO thin films showed a very smooth and featureless surface. From the measurements of XRD patterns, only the amorphous structure was observed. We aimed to show that the deposition power of GZO ceramic target had large effect on the Eg values, Hall mobility, carrier concentration, and resistivity of IGZO thin films. Secondary ion mass spectrometry (SIMS) analysis in the thicknesses’ profile of IGZO thin films found that In and Ga elements were uniform distribution and Zn element were non-uniform distribution. The SIMS analysis results also showed the concentrations of Ga and Zn elements increased and the concentrations of In element was almost unchanged with increasing deposition power. OPEN ACCESS Materials 2015, 8 2770 |
| Starting Page | 2769 |
| Ending Page | 2781 |
| Page Count | 13 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.mdpi.com/1996-1944/8/5/2769/pdf |
| PubMed reference number | 5455548 |
| Volume Number | 8 |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | 3D film Ceramics Chemical vapor deposition Choose (action) Circuit complexity Eighty Electron mobility Finite Element Analysis Guilty Gear Xrd Hall effect Indium gallium zinc oxide Indium(III) oxide Ions Maxima and minima Physical vapor deposition Power (Psychology) Secondary ion mass spectrometry The Sims Thickness (graph theory) |
| Content Type | Text |
| Resource Type | Article |
