NDLI: Micro magnetic silicone elastomer membrane actuator

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Micro magnetic silicone elastomer membrane actuator

Content Provider	Semantic Scholar
Author	Khoo, Melvin Liu, Chang
Copyright Year	2001
Abstract	We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni80Fe20) are embedded in a thin ̄exible membrane made of silicone elastomer. When an external magnetic ®eld is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-mm-wide, 870mm-long, and 22-mm-thick are strategically positioned in a 2-mm-square, 40-mm-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 mm in the presence of a 2:85 10 A/m external magnetic ®eld. Larger displacements are possible with greater magnetization ®elds. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in micro ̄uidic systems. # 2001 Elsevier Science B.V. All rights reserved.
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://pdfs.semanticscholar.org/e214/ac15f94a761bbf4649f82dcf318eb1048ec0.pdf
Alternate Webpage(s)	http://medx.mech.northwestern.edu/publications/papers/54.pdf
Language	English
Access Restriction	Open
Subject Keyword	ARID1A wt Allele Actuator Device Component Dimethylpolysiloxanes Displacement mapping Eighty Embedded system Embedding Large Microfabrication Numerical analysis Orbital magnetization PDMS Psychologic Displacement Semiconductor device fabrication Silicone Elastomers Silicones Simulation Tissue membrane
Content Type	Text
Resource Type	Article

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