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Precision Positioning Using a Microfabricated Electrostatic Actuator
| Content Provider | Semantic Scholar |
|---|---|
| Author | Horsley, David A. Wongkomet, N. Horowitz, Roberto Albert Pisano |
| Copyright Year | 2004 |
| Abstract | Abstruct This paper presents a microfabricated actuator designed for high precision servo-positioning in a magnetic hard disk drive. The device is actuated using electrostatic force generated with parallel-plate capacitive electrodes. The displacement of these electrodes is measured using a dedicated capacitive sensing interface, allowing closed-loop control to be used to extend the servo bandwidth. Using the sensing electronics and a simple phase-lead compensator, a prototype device was used to actuate a 1.6 mg ceramic slider over a 1.2 kHz bandwidth. Using optical position measurements, the same actuator was used to achieve a 2.5 kHz bandwidth. Index Terms Actuator, disk drive, micro-electromechanical systems, position control. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.me.berkeley.edu/~horowitz/Publications_files/All_papers_numbered/Horsley_MEMS_Fab_Control_IEEE_TMagnetics_1998.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Actuator Device Component Bandwidth (signal processing) Capacitive sensing Computer Hard Disc Control theory Disk storage Displacement mapping Hard disk drive Interface Device Component Kilohertz Microelectromechanical systems Microfabrication Prototype Psychologic Displacement Servo Device Component electrode |
| Content Type | Text |
| Resource Type | Article |
