NDLI: Lattice-size Dependence and Dynamics of Surface Mean Slope in a Thin Film Deposition Process

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Lattice-size Dependence and Dynamics of Surface Mean Slope in a Thin Film Deposition Process

Content Provider	Semantic Scholar
Author	Huang, Jianqiao Hu, Gangshi Orkoulas, Gerassimos Christofides, Panagiotis D.
Copyright Year	2010
Abstract	Abstract This work focuses on the study of the dynamic behavior and lattice size dependence of the surface root-mean-square slope in a porous thin film deposition process taking place on a triangular lattice. The simulation results indicate that the expected mean slope square reaches quickly a steady-state value and exhibits a very weak dependence with respect to lattice size variation. The simulation findings are corroborated by an analysis of appropriate finite-difference discretizations of surface height profiles computed by an Edwards-Wilkinson-type partial differential equation that can be used to describe the dynamics of surface height profile in the thin film deposition process under consideration.
Starting Page	811
Ending Page	816
Page Count	6
File Format	PDF HTM / HTML
DOI	10.3182/20100705-3-BE-2011.00134
Volume Number	43
Alternate Webpage(s)	http://www.nt.ntnu.no/users/skoge/prost/proceedings/dycops-2010/Papers_DYCOPS2010/WeET1-06.pdf
Alternate Webpage(s)	http://folk.ntnu.no/skoge/prost/proceedings/dycops-2010/Papers_DYCOPS2010/WeET1-06.pdf
Alternate Webpage(s)	https://doi.org/10.3182/20100705-3-BE-2011.00134
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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