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Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hu, Gangshi Huang, Jianqiao Orkoulas, Gerassimos Christofides, Panagiotis D. |
| Copyright Year | 2009 |
| Abstract | The dependence of film surface roughness and porosity on lattice size in a porous thin film deposition process is studied via kinetic Monte Carlo simulations on a triangular lattice. For sufficiently large lattice size the steady-state value of the expected film porosity has a weak dependence on the lattice size and the steady-state value of the expected surface roughness square varies linearly with lattice size. An analysis of the film morphology based on a stochastic partial differential equation description of the film surface morphology supports and explains the findings of the numerical simulations. |
| Starting Page | 041122 |
| Ending Page | 041122 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| PubMed reference number | 19905288 |
| Journal | Medline |
| Volume Number | 80 |
| Issue Number | 4 |
| Part | 1 |
| Alternate Webpage(s) | http://pdclab.seas.ucla.edu/Publications/GHu/GHu_JHuang_GOrkoulas_PDChristofides_PRE_2009_80_Film_Surface_Roughness_Porosity_Dependence_Lattice_Size_Porous_Film_Deposition.pdf |
| Alternate Webpage(s) | http://pdclab.seas.ucla.edu/makis/papers_makis.pdf |
| Alternate Webpage(s) | https://doi.org/10.1103/PhysRevE.80.041122 |
| Journal | Physical review. E, Statistical, nonlinear, and soft matter physics |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
