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Advanced on Beam Detector for on Implantation Tools Background of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Krueger, Christian |
| Copyright Year | 2017 |
| Abstract | The present invention provides an improved Faraday cup configuration that allows determination of a non-Zero angle of incidence and/or a beam divergence with high accuracy. Moreover, by Substantially simultaneously and continuously displaying information of a plurality of Faraday cups, the Set-up of an implantation tool may be significantly facili tated and may be carried out in a Substantially automated C. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/63/4e/5c/0c26e6eb1034a7/US20040262533A1.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |