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The State of Art Survey on Micro cantilevers for MEMS Devices
| Content Provider | Semantic Scholar |
|---|---|
| Author | Chandel, Tanvi Singh, Balwinder |
| Copyright Year | 2014 |
| Abstract | Arrival of Micro-electromechanical system (MEMS) in the last decade has been immense and ever growing. MEMS is an expanding and fast growing technology with an extensive range of applications. Micro cantilevers belongs to MEMS set of devices and are often used for detection of forces in Micromechanical Sensors(e.g. pressure sensors & accelerometers) and probe for force sensor to atomic force microscope used as transducers, transport mechanisms, relays, switches, resonators etc. In this paper, the relative study and recent development of different micro cantilevers which differ in the material being used and in their construction are discussed and compared to each other based on various parameters. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://www.researchgate.net/profile/Balwinder_Lakha/publication/284370278_The_State_of_Art_Survey_on_Micro_cantilevers_for_MEMS_Devices/links/573422a008ae9f741b261e94.pdf?origin=publication_list |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Atomic-force microscopy Medication Event Monitoring System Micro-Electrical-Mechanical Systems Microelectromechanical systems Microscope Device Component Network switch Relay Scanning Probe Microscopes (device) Switch Device Component Transducer Transducers accelerometers sensor (device) |
| Content Type | Text |
| Resource Type | Article |
