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Formation of gold nanoparticles in silicon suboxide films prepared by plasma enhanced chemical vapour deposition
| Content Provider | Semantic Scholar |
|---|---|
| Author | Chan, Keewah Aspanut, Zarina Goh, Boon Tong Muhamad, Muhamad Rasat Rahman, Saadah Abdul |
| Copyright Year | 2011 |
| Abstract | Nanostructured materials fabricated by dispersing metal particles on the dielectric surface have potential application in the field of nanotechnology. Interfacial metal particles/dielectric matrix interaction is important in manipulating the structural and optical properties of metal/dielectric films. In this work, a thin layer of gold (Au) was sputtered onto the surface of silicon oxide, SiO x (0.38 |
| Starting Page | 4952 |
| Ending Page | 4957 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.tsf.2011.01.060 |
| Volume Number | 519 |
| Alternate Webpage(s) | http://repository.um.edu.my/14073/1/Thin%20Solid%20Films%202011%20-%20Formation%20of%20gold%20nanoparticles%20in%20silicon%20suboxide%20films%20prepared%20by%20plasma.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |