NDLI: Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever.

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Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever.

Content Provider	Semantic Scholar
Author	Abdulla, Shahina M. C. Kauppinen, Lasse Juhana Dijkstra, Meindert Boer, Meint J. De Berenschot, Erwin J. W. Jansen, Henricus V. Ridder, Rene M. De Krijnen, Gijs J. M.
Copyright Year	2011
Abstract	The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately position them near the evanescent field of the resonator. Using electrostatic actuation, moving the cantilevers into this evanescent field, the propagation properties of the ring waveguide are modulated. We demonstrate 122 pm tuning of the resonance wavelength of the optical ring resonator (in the optical C-band) without change of the optical quality factor, on application of 9 V to a 40 µm long cantilever. This compact integrated device can be used for tuning/switching a specific wavelength, with very little energy for operation and negligible cross talk with surrounding devices.
Starting Page	462
Ending Page	466
Page Count	5
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://doc.utwente.nl/78016/1/Tuning_a_racetrack_-_Shahina_-_sept_2011.pdf
PubMed reference number	21934949v1
Alternate Webpage(s)	https://doi.org/10.1364/OE.19.015864
DOI	10.1364/oe.19.015864
Journal	Optics express
Volume Number	19
Issue Number	17
Language	English
Access Restriction	Open
Subject Keyword	Actuation Dosing Unit Intrauterine Devices Large Medication Event Monitoring System Micro-Electrical-Mechanical Systems Microtechnology Oral Wafer Relative Biological Effectiveness Resonator Device Component Silicon Waveguide Device Component wavelength
Content Type	Text
Resource Type	Article

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