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Architecture of a Three-Probe MEMS Nanomanipulator with Nanoscale End-Effectors
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wang, Xuefeng Vincent, Loren Yu, Minfeng Huang, Yonggang Liu, Chang |
| Copyright Year | 2003 |
| Abstract | We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale endeffectors to directly interface with nanoscopic objects. The end-effectors are made using focused ion beam milling. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://medx.mech.northwestern.edu/publications/papers/101.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Actuation Dosing Unit Focused ion beam Handling (Psychology) Interface Device Component Ions Medication Event Monitoring System Microelectromechanical systems Microtechnology Nanofabrication Nanomanipulator Physical object Power (Psychology) |
| Content Type | Text |
| Resource Type | Article |
