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Integrated optical dual-cantilever arrays in silica on silicon.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Cooper, Peter Allan Carpenter, Lewis G. Mennea, Paolo L. Holmes, Christopher S. Gates, James C. Smith, Peter G. R. |
| Copyright Year | 2014 |
| Abstract | A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation. |
| Starting Page | 123 |
| Ending Page | 127 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://eprints.soton.ac.uk/375055/1/6765.pdf |
| PubMed reference number | 25607148v1 |
| Alternate Webpage(s) | https://doi.org/10.1364/OE.22.031801 |
| DOI | 10.1364/oe.22.031801 |
| Journal | Optics express |
| Volume Number | 22 |
| Issue Number | 26 |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Actuation Dosing Unit Actuator Device Component Attenuator Device Component Contain (action) Dual Electroconvulsive Therapy Embedding Fiber Optic Technology Microtechnology Optical Devices Optical Fiber Device Component Optical Trap Optics Psychologic Displacement Silicon Waveguide Device Component sensor (device) wavelength |
| Content Type | Text |
| Resource Type | Article |
