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Design of Surface Micromachined Compliant MEMS
| Content Provider | Semantic Scholar |
|---|---|
| Author | Sarma, Radha Bradley, Joe A. |
| Copyright Year | 2002 |
| Abstract | The consideration uf compiiant mechanisms as Microelectromechanical Systems (MEIWS) is the focus of this research endeavor, MEMS are micron to millimeter devices that combine electrical, mechanical, and information processing capabilities on the same device. These MEMS need some mechanical motion or parts that move relative to each other. This relative motion, using multiple parts, is not desired because of the assembly requirement and the friction introduced. Compliant devices limits or eliminates friction and the need for multi-component assembly. Compliant devices improve designs by creating single piece mechanisms. The purpose of this research is to validate surface micromachining as a viable fabrication process for compliant MEMS designs. Specifically, this research has sought to fabricate a microcompliant gripper and a micro-compliant clamp to illustrate the process. While other researchers have created compliant MEMS, most have used comb-drive actuation methods and bulk micromachining processes. This research focuses on fullycompliant devices that use device flexibility for motion and actuation. Validation of these compliant MEMS is achieved by structural optimization of device design and functional performance testing. This research contributes to the ongoing research in MEMS by evaluating the potential of using surface micromachining as a process for fabricating compliant micro-mechanisms. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://digital.library.unt.edu/ark:/67531/metadc742305/m2/1/high_res_d/798520.pdf |
| Alternate Webpage(s) | https://digital.library.unt.edu/ark:/67531/metadc743274/m2/1/high_res_d/804164.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Actuation Dosing Unit Assembly language Clamping (graphics) Compliance behavior Friction Information processing Mathematical optimization Microelectromechanical systems Microtechnology Numerous Robot end effector Semiconductor device fabrication Shape optimization Software performance testing millimeter |
| Content Type | Text |
| Resource Type | Article |
