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Deposition of Aluminium Nitride Film by Magnetron Sputtering for Diamond-Based Surface Acoustic Wave Applications
Content Provider | Scilit |
---|---|
Author | D'Haen, Jan D'olieslaeger, M. Mortet, Vincent Nesladek, M. Vanhoyland, G. Elmazria, Omar Assouar, M. B. Alnot, P. |
Copyright Year | 2002 |
Description | Journal: Physica Status Solidi (a) |
Ending Page | 488 |
Starting Page | 482 |
ISSN | 2573508X |
e-ISSN | 1521396X |
DOI | 10.1002/1521-396x%28200210%29193%3A3%3C482%3A%3Aaid-pssa482%3E3.0.co%3B2-d |
Journal | Physica Status Solidi (a) |
Issue Number | 3 |
Volume Number | 193 |
Language | English |
Publisher | Wiley-Blackwell |
Publisher Date | 2002-10-01 |
Access Restriction | Open |
Subject Keyword | Journal: Physica Status Solidi (a) Coatings and Films Magnetron Sputtering Surface Acoustic Wave |
Content Type | Text |
Resource Type | Article |