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Study of Niobium Nitride Films Produced by DC Reactive Magnetron Sputtering
Content Provider | Scilit |
---|---|
Author | Hotovy, I. Buc, D. Brcka, J. Srnanek, R. |
Copyright Year | 1997 |
Description | Journal: Physica Status Solidi (a) |
Ending Page | 104 |
Starting Page | 97 |
ISSN | 2573508X |
e-ISSN | 1521396X |
DOI | 10.1002/1521-396x%28199705%29161%3A1%3C97%3A%3Aaid-pssa97%3E3.0.co%3B2-o |
Journal | Physica Status Solidi (a) |
Issue Number | 1 |
Volume Number | 161 |
Language | English |
Publisher | Wiley-Blackwell |
Publisher Date | 1997-05-01 |
Access Restriction | Open |
Subject Keyword | Journal: Physica Status Solidi (a) Coatings and Films Magnetron Sputtering X Ray Diffraction Auger Electron Spectroscopy Transmission Electron Microscopy |
Content Type | Text |
Resource Type | Article |