NDLI: Low-Temperature Synthesis of Gallium Nitride Thin Films Using Reactive Rf-Magnetron Sputtering

Content Provider	Scilit
Author	Bondar, V. Kucharsky, I. Simkiv, B. Akselrud, L. Davydov, V. Dubov, Yu. Popovich, S.
Copyright Year	1999
Description	Journal: Physica Status Solidi (a)
Related Links	http://onlinelibrary.wiley.com/doi/10.1002/(SICI)1521-396X(199911)176:1<329::AID-PSSA329>3.0.CO;2-E/pdf
Ending Page	332
Page Count	4
Starting Page	329
ISSN	00318965
e-ISSN	1521396X
DOI	10.1002/%28sici%291521-396x%28199911%29176%3A1%3C329%3A%3Aaid-pssa329%3E3.3.co%3B2-5
Journal	Physica Status Solidi (a)
Issue Number	1
Volume Number	176
Language	English
Publisher	Wiley-Blackwell
Publisher Date	1999-11-22
Access Restriction	Open
Subject Keyword	Journal: Physica Status Solidi (a) Coatings and Films Crystal Structure Gallium Nitride Magnetron Sputtering Nitride Thin Films Working Gas
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials

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Low-Temperature Synthesis of Gallium Nitride Thin Films Using Reactive Rf-Magnetron Sputtering